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A Memory Strategies Focus Report

RRAM, Selector & 3D Cross-Point Array Technology, February 2016
 

3D cross-point Resistance RAM (RRAM) arrays have the potential to be the next high density non-volatile memory potentially succeeding the NAND Flash. Near term applications being considered include: Storage Class Memory, mobile device storage, medical devices and IoT memory. RRAM cross-point array memories are compatible with advanced CMOS production processes with minimal added mask and process steps. Peripheral circuits can be placed under the array to increase array efficiency. Fabrication techniques, such as used for 3D vertical NAND flash, can be used to increase the density of a vertical 3D RRAM cross-point array at low cost and 4F2 cell size. Stack height can be reduced using ultra-thin layers, possibly of graphene. Sneak current leakage in high density arrays can be reduced by using RRAMs with highly non-linear IV curves, by using one of the many bidirectional selectors in development or by the use of anti-serially connected bipolar RRAMs, "complementary resistive switches", for the memory element in a cross-point array. A significant number of models have been developed and many test and reliability studies conducted in the past year in preparation for this high density memory technology entering production. A complete bibliography of the 260+ research papers on this topic covered in this report is included for ease of reference.

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Table of Contents -  RRAM, Selector and 3D Cross-Point Array Technology, February 2016

Executive Summary

1.0 Overview and Applications

2.0 RRAM Chips - Device and Circuitry

3.0 RRAM Cell and Cross-point Array Chip - Process and Manufacturing

4.0 An Analytical Look at Vertical Cross-Point Memory Array Design

5.0 Selectorless and Reduced Selector Cross-Point Memory Arrays

6.0 Characteristics of Various Bipolar Metal Oxide RRAMs

7.0 Material, Thermal, and Reliability Characteristics of MO RRAMS

8.0 Characteristics of Conductive Bridge Bipolar ReRAM

9.0 Non-Filamentary RRAMs

10.0 Characteristics of Unipolar RRAM in Cross-Point Arrays

11. Characterization, Test, Reliability and Modeling of RRAM Arrays

12.0 Experimental and Future RRAMs

13.0 BiDirectional Selector Drivers for Bipolar RRAM Cross-Bar Arrays

14.0 Selectors for Unipolar Cross-Point Arrays

15.0 Selector Design and Characterization

16.0 Complementary Resistive Switching in RRAM Cross-Point Arrays

Bibliography

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